Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

• Main Authors: Yang, Fajun, Wu, Naiqi, Qiao, Yan, Su, Rong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Multi-cluster Tool; Petri Nets
• Online Access: https://hdl.handle.net/10356/141782
• Institution: Nanyang Technological University

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer...