Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming

• Main Authors: Yang, FaJun, Wu, NaiQi, Qiao, Yan, Zhou, MengChu, Su, Rong, Qu, Ting
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2020
• 主題: Engineering::Electrical and electronic engineering; Cluster Tools; Cyclic Scheduling
• 在線閱讀: https://hdl.handle.net/10356/139933

Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case w...