Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming

• Main Authors: Yang, FaJun, Wu, NaiQi, Qiao, Yan, Zhou, MengChu, Su, Rong, Qu, Ting
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Cluster Tools; Cyclic Scheduling
• Online Access: https://hdl.handle.net/10356/139933
• Institution: Nanyang Technological University

Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case w...