Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming

Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case w...

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Bibliographic Details
Main Authors: Yang, FaJun, Wu, NaiQi, Qiao, Yan, Zhou, MengChu, Su, Rong, Qu, Ting
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/139933
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Institution: Nanyang Technological University
Language: English