Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming

Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case w...

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Main Authors: Yang, FaJun, Wu, NaiQi, Qiao, Yan, Zhou, MengChu, Su, Rong, Qu, Ting
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2020
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Online Access:https://hdl.handle.net/10356/139933
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1399332020-06-10T06:09:27Z Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming Yang, FaJun Wu, NaiQi Qiao, Yan Zhou, MengChu Su, Rong Qu, Ting School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering Cluster Tools Cyclic Scheduling Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the backward one. This work uses a timed Petri net (PN) to model the dynamic behavior of the system and presents a method to determine the optimal scheduling strategy for the system. Based on its PN model and the obtained strategy, it reveals that the key issue to schedule such a tool is to determine when and how long the robot should wait for. Based on this finding, this work establishes for the first time the necessary and sufficient conditions regarding the existence of an optimal and feasible one-wafer cyclic schedule for singlerobot-arm cluster tools. It then formulates a computationally efficient linear program to find it if existing, and finally gives industrial examples to show the application and power of the proposed method. NRF (Natl Research Foundation, S’pore) Accepted version 2020-05-22T09:04:01Z 2020-05-22T09:04:01Z 2017 Journal Article Yang, F., Wu, N., Qiao, Y., Zhou, M., Su, R., & Qu, T. (2020). Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming. IEEE Transactions on Systems, Man, and Cybernetics: Systems, 50(3), 871-883. doi:10.1109/TSMC.2017.2755599 2168-2216 https://hdl.handle.net/10356/139933 10.1109/TSMC.2017.2755599 2-s2.0-85059048026 3 50 871 883 en IEEE Transactions on Systems, Man, and Cybernetics: Systems © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: https://doi.org/ 10.1109/TSMC.2017.2755599 application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic Engineering::Electrical and electronic engineering
Cluster Tools
Cyclic Scheduling
spellingShingle Engineering::Electrical and electronic engineering
Cluster Tools
Cyclic Scheduling
Yang, FaJun
Wu, NaiQi
Qiao, Yan
Zhou, MengChu
Su, Rong
Qu, Ting
Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming
description Scheduling a cluster tool with wafer residency time constraints is challenging and important in wafer manufacturing. With a backward strategy, the scheduling problem of such singlerobot-arm cluster tools is well-studied in the literature. It is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the backward one. This work uses a timed Petri net (PN) to model the dynamic behavior of the system and presents a method to determine the optimal scheduling strategy for the system. Based on its PN model and the obtained strategy, it reveals that the key issue to schedule such a tool is to determine when and how long the robot should wait for. Based on this finding, this work establishes for the first time the necessary and sufficient conditions regarding the existence of an optimal and feasible one-wafer cyclic schedule for singlerobot-arm cluster tools. It then formulates a computationally efficient linear program to find it if existing, and finally gives industrial examples to show the application and power of the proposed method.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Yang, FaJun
Wu, NaiQi
Qiao, Yan
Zhou, MengChu
Su, Rong
Qu, Ting
format Article
author Yang, FaJun
Wu, NaiQi
Qiao, Yan
Zhou, MengChu
Su, Rong
Qu, Ting
author_sort Yang, FaJun
title Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming
title_short Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming
title_full Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming
title_fullStr Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming
title_full_unstemmed Modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via Petri nets and linear programming
title_sort modeling and optimal cyclic scheduling of time-constrained single-robot-arm cluster tools via petri nets and linear programming
publishDate 2020
url https://hdl.handle.net/10356/139933
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