Automatic localization of signal sources in photon emission images for integrated circuit analysis

• Main Authors: Boscaro, Anthony, Jacquir, Sabir, Chef, Samuel, Sanchez, Kevin, Perdu, Philippe, Binczak, Stéphane
• Other Authors: Temasek Laboratories
• Format: Article
• Language: English
• Published: 2020
• Subjects: Science::Physics; Photon Emission; Microelectronics Reliability
• Online Access: https://hdl.handle.net/10356/141803
• Institution: Nanyang Technological University

Defects localization is a key step in failure analysis of highly scaled complementary oxide semiconductor integrated circuits (ICs). It gives prior information on VLSI circuits and allows the designers to improve their diagnostic. Light emission techniques are efficient to localize defects in modern...