Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications

• المؤلفون الرئيسيون: Cheng, Shi-De, Zhou, Yan, Kam, Chan Hin, Lam, Yee Loy, Chan, Yuen-Chuen, Que, Wenxiu, Gan, Woon Siong
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2020
• الموضوعات: Engineering::Electrical and electronic engineering; Litao3; Sol-GEL
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/141855

Thin films of lithium tantalate have been derived on SiO2/Si substrate by sol-gel method. The sol is prepared by mixing LiOC2H5 and Ta(OC2H5)5. The film is deposited by spin- coating and annealing at 600°C. The film is characterized by means of X-ray diffraction, atomic force microscopy, and the m-l...