Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications

• Main Authors: Cheng, Shi-De, Zhou, Yan, Kam, Chan Hin, Lam, Yee Loy, Chan, Yuen-Chuen, Que, Wenxiu, Gan, Woon Siong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Litao3; Sol-GEL
• Online Access: https://hdl.handle.net/10356/141855
• Institution: Nanyang Technological University

Thin films of lithium tantalate have been derived on SiO2/Si substrate by sol-gel method. The sol is prepared by mixing LiOC2H5 and Ta(OC2H5)5. The film is deposited by spin- coating and annealing at 600°C. The film is characterized by means of X-ray diffraction, atomic force microscopy, and the m-l...