Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications

Thin films of lithium tantalate have been derived on SiO2/Si substrate by sol-gel method. The sol is prepared by mixing LiOC2H5 and Ta(OC2H5)5. The film is deposited by spin- coating and annealing at 600°C. The film is characterized by means of X-ray diffraction, atomic force microscopy, and the m-l...

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Main Authors:	Cheng, Shi-De, Zhou, Yan, Kam, Chan Hin, Lam, Yee Loy, Chan, Yuen-Chuen, Que, Wenxiu, Gan, Woon Siong
Other Authors:	School of Electrical and Electronic Engineering
Format:	Article
Language:	English
Published:	2020
Subjects:	Engineering::Electrical and electronic engineering Litao3 Sol-GEL
Online Access:	https://hdl.handle.net/10356/141855
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-141855
record_format	dspace
spelling	sg-ntu-dr.10356-1418552020-06-11T05:09:07Z Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications Cheng, Shi-De Zhou, Yan Kam, Chan Hin Lam, Yee Loy Chan, Yuen-Chuen Que, Wenxiu Gan, Woon Siong School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering Litao3 Sol-GEL Thin films of lithium tantalate have been derived on SiO2/Si substrate by sol-gel method. The sol is prepared by mixing LiOC2H5 and Ta(OC2H5)5. The film is deposited by spin- coating and annealing at 600°C. The film is characterized by means of X-ray diffraction, atomic force microscopy, and the m-line technique. The experimental results show that the film has crystallized into the pure trigonal phase and it is microsopically continuous and uniform. The crystalline size ranges from about 33nm to 96nm. The refractive index of the film is measured to be 1.84 at the wavelength of 633nm and the film is found to support several guiding modes at this wavelength. © 2001 Taylor & Francis. 2020-06-11T05:09:07Z 2020-06-11T05:09:07Z 2001 Journal Article Cheng, S.-D., Zhou, Y., Kam, C. H., Lam, Y. L., Chan, Y.-C., Que, W., & Gan W. S. (2001). Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications. Fiber and Integrated Optics, 20(1), 45-52. doi:10.1080/01468030120669 0146-8030 https://hdl.handle.net/10356/141855 10.1080/01468030120669 2-s2.0-0035742256 1 20 45 52 en Fiber and Integrated Optics © 2001 Taylor & Francis. All rights reserved.
institution	Nanyang Technological University
building	NTU Library
country	Singapore
collection	DR-NTU
language	English
topic	Engineering::Electrical and electronic engineering Litao3 Sol-GEL
spellingShingle	Engineering::Electrical and electronic engineering Litao3 Sol-GEL Cheng, Shi-De Zhou, Yan Kam, Chan Hin Lam, Yee Loy Chan, Yuen-Chuen Que, Wenxiu Gan, Woon Siong Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
description	Thin films of lithium tantalate have been derived on SiO2/Si substrate by sol-gel method. The sol is prepared by mixing LiOC2H5 and Ta(OC2H5)5. The film is deposited by spin- coating and annealing at 600°C. The film is characterized by means of X-ray diffraction, atomic force microscopy, and the m-line technique. The experimental results show that the film has crystallized into the pure trigonal phase and it is microsopically continuous and uniform. The crystalline size ranges from about 33nm to 96nm. The refractive index of the film is measured to be 1.84 at the wavelength of 633nm and the film is found to support several guiding modes at this wavelength. © 2001 Taylor & Francis.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Cheng, Shi-De Zhou, Yan Kam, Chan Hin Lam, Yee Loy Chan, Yuen-Chuen Que, Wenxiu Gan, Woon Siong
format	Article
author	Cheng, Shi-De Zhou, Yan Kam, Chan Hin Lam, Yee Loy Chan, Yuen-Chuen Que, Wenxiu Gan, Woon Siong
author_sort	Cheng, Shi-De
title	Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
title_short	Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
title_full	Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
title_fullStr	Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
title_full_unstemmed	Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
title_sort	sol-gel derived thin films of litao3 on sio2/si substrates for optical waveguide applications
publishDate	2020
url	https://hdl.handle.net/10356/141855
_version_	1681058280838791168

Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications

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