3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI

• Main Authors: Liu, Wenjuan, He, Leming, Wang, Xubo, Zhou, Jia, Xu, Weijiang, Smagin, Nikolay, Toubal, Malika, Yu, Hao, Gu, Yuandong, Xu, Jinghui, Remiens, Denis, Ren, Junyan
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; PMUT; 3D FEM
• Online Access: https://hdl.handle.net/10356/142156
• Institution: Nanyang Technological University

This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched...