P-type doping of zinc oxide by metal-organic chemical vapor deposition

• المؤلف الرئيسي: Sun, Xiaowei.
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Research Report
• اللغة: English
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/14235
• المؤسسة: Nanyang Technological University

In this project, we investigated the growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), which was set up with the support of this project. The growth of the ZnO thin films was studied with various growth paramete...