P-type doping of zinc oxide by metal-organic chemical vapor deposition

• Main Author: Sun, Xiaowei.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/14235
• Institution: Nanyang Technological University

In this project, we investigated the growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), which was set up with the support of this project. The growth of the ZnO thin films was studied with various growth paramete...