The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system

• المؤلفون الرئيسيون: Ni, Zhengji, Zhang, Dawei, Sun, Haojie, Wang, Wenna, Zhang, Dao Hua, Mei, Ting
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/99300; http://hdl.handle.net/10220/17629

AZO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of the ion beam post-treatment on AZO films properties, and one new way to obtain low surface roughness and low sheet res...