The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system

• Main Authors: Ni, Zhengji, Zhang, Dawei, Sun, Haojie, Wang, Wenna, Zhang, Dao Hua, Mei, Ting
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/99300; http://hdl.handle.net/10220/17629
• Institution: Nanyang Technological University

AZO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of the ion beam post-treatment on AZO films properties, and one new way to obtain low surface roughness and low sheet res...