Investigation of metal/metal oxide self-assembled nanoclusters in diamond-like carbon films

• Main Author: Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/14527
• Institution: Nanyang Technological University

In this project, several sets of metal and metal oxide containing diamond like carbon films were successfully deposited by using an FCVA system from metal/carbon composite targets. A systematical investigation of such films has been carried out. The metal composition in all a-C:Me films increased...