Development of diamond-like carbon films by ECR-CVD

• Main Author: Yang, Hong
• Other Authors: Yoon, Soon Fatt
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/19582
• Institution: Nanyang Technological University

Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanica...