Development of diamond-like carbon films by ECR-CVD
Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanica...
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sg-ntu-dr.10356-195822023-07-04T15:22:36Z Development of diamond-like carbon films by ECR-CVD Yang, Hong Yoon, Soon Fatt School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanical hardness have been successfully applied in various fields such as optical, wear and corrosion resistant coatings. Master of Engineering 2009-12-14T06:16:23Z 2009-12-14T06:16:23Z 1998 1998 Thesis http://hdl.handle.net/10356/19582 en Nanyang Technological University 103 p. application/pdf |
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DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials |
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DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Yang, Hong Development of diamond-like carbon films by ECR-CVD |
| description |
Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanical hardness have been successfully applied in various fields such as optical, wear and corrosion resistant coatings. |
| author2 |
Yoon, Soon Fatt |
| author_facet |
Yoon, Soon Fatt Yang, Hong |
| format |
Theses and Dissertations |
| author |
Yang, Hong |
| author_sort |
Yang, Hong |
| title |
Development of diamond-like carbon films by ECR-CVD |
| title_short |
Development of diamond-like carbon films by ECR-CVD |
| title_full |
Development of diamond-like carbon films by ECR-CVD |
| title_fullStr |
Development of diamond-like carbon films by ECR-CVD |
| title_full_unstemmed |
Development of diamond-like carbon films by ECR-CVD |
| title_sort |
development of diamond-like carbon films by ecr-cvd |
| publishDate |
2009 |
| url |
http://hdl.handle.net/10356/19582 |
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1772827793212571648 |