Development of diamond-like carbon films by ECR-CVD

Development of diamond-like carbon films by ECR-CVD

Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanica...

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Bibliographic Details
Main Author: Yang, Hong
Other Authors: Yoon, Soon Fatt
Format: Theses and Dissertations
Language:English
Published: 2009
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:http://hdl.handle.net/10356/19582
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Institution: Nanyang Technological University
Language: English
Description
Summary:Hydrogenated amorphous carbon (a-C: H)thin films have attracted considerable interest due to their unique properties such as chemical inertness, mechanical hardness and high photoluminescence efficiency at room temperature. Specifically, a-C: H which exhibit diamond-like properties such as mechanical hardness have been successfully applied in various fields such as optical, wear and corrosion resistant coatings.

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