PIC-integrable, uniformly 056%-tensile strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor

• Main Authors: Lin, Yiding, Ma, Danhao, Lee, Kwang Hong, Wen, Rui-Tao, Syaranamual, Govindo, Kimerling, Lionel, Tan, Chuan Seng, Michel, Jurgen
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2021
• 主題: Engineering::Electrical and electronic engineering::Semiconductors; Germanium; Photodetector
• 在線閱讀: https://hdl.handle.net/10356/148609
• 機構: Nanyang Technological University

Mechanical strain engineering has been promising for many integrated photonic applications. However, for the engineering of material electronic bandgap, a trade-off exists between the strain uniformity and the integration compatibility with photonic-integrated circuits (PICs). Herein, we adopted...