The amorphization of monolayer MoS2 induced by strong oxygen plasma treatment

• Main Authors: Meng, Jian-Ling, Zhu, Jian-Qi, Jia, Shun-Tian, Ren, Xiao
• Other Authors: School of Materials Science and Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Materials; MoS2; Amorphization
• Online Access: https://hdl.handle.net/10356/148712
• Institution: Nanyang Technological University

By strong oxygen plasma treatment on monolayer MoS2, we observe the disappearance of the Raman modes of MoS2. We propose the hypothesis that the state of MoS2 translates from crystal to amorphous after strong oxygen plasma treatment. The evidences of no MoO3 formation shown by Raman spectra and the...