An ultra-high-vacuum rotating sample manipulator with cryogenic cooling

• المؤلفون الرئيسيون: Tee, Xian Yang, Paré, A., Petrović, Alexander Paul, Panagopoulos, Christos
• مؤلفون آخرون: School of Physical and Mathematical Sciences
• التنسيق: مقال
• اللغة: English
• منشور في: 2021
• الموضوعات: Science::Physics; Manipulators; Ultrahigh Vacuum; Thermal Effects
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/148893
• المؤسسة: Nanyang Technological University

We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering.