An ultra-high-vacuum rotating sample manipulator with cryogenic cooling

An ultra-high-vacuum rotating sample manipulator with cryogenic cooling

We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for...

Full description

Saved in:
Bibliographic Details
Main Authors: Tee, Xian Yang, Paré, A., Petrović, Alexander Paul, Panagopoulos, Christos
Other Authors: School of Physical and Mathematical Sciences
Format: Article
Language:English
Published: 2021
Subjects:
Science::Physics
Manipulators
Ultrahigh Vacuum
Thermal Effects
Online Access:https://hdl.handle.net/10356/148893
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
Description
Summary:We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering.

Similar Items