An ultra-high-vacuum rotating sample manipulator with cryogenic cooling

An ultra-high-vacuum rotating sample manipulator with cryogenic cooling

We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for...

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Main Authors: Tee, Xian Yang, Paré, A., Petrović, Alexander Paul, Panagopoulos, Christos
Other Authors: School of Physical and Mathematical Sciences
Format: Article
Language:English
Published: 2021
Subjects:
Science::Physics
Manipulators
Ultrahigh Vacuum
Thermal Effects
Online Access:https://hdl.handle.net/10356/148893
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1488932023-02-28T19:52:45Z An ultra-high-vacuum rotating sample manipulator with cryogenic cooling Tee, Xian Yang Paré, A. Petrović, Alexander Paul Panagopoulos, Christos School of Physical and Mathematical Sciences Science::Physics Manipulators Ultrahigh Vacuum Thermal Effects We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering. Ministry of Education (MOE) National Research Foundation (NRF) Published version We acknowledge support from the Singapore National Research Foundation (NRF) Investigatorship (Grant No. NRFNRFI2015-04) and MOE Academic Research Fund Tier 3 (Grant No. MOE2018-T3-1-002). We thank Ferrovac GmbH for technical assistance. 2021-08-30T05:18:58Z 2021-08-30T05:18:58Z 2020 Journal Article Tee, X. Y., Paré, A., Petrović, A. P. & Panagopoulos, C. (2020). An ultra-high-vacuum rotating sample manipulator with cryogenic cooling. Review of Scientific Instruments, 91(11), 116104-. https://dx.doi.org/10.1063/5.0021595 0034-6748 0000-0002-7050-658X 0000-0003-4692-3233 https://hdl.handle.net/10356/148893 10.1063/5.0021595 33261466 2-s2.0-85095827988 11 91 116104 en NRFNRFI2015-04 MOE2018-T3-1-002 Review of Scientific Instruments © 2020 Author(s). All rights reserved. This paper was published by American Institute of Physics (AIP) in Review of Scientific Instruments and is made available with permission of the Author(s). application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Science::Physics
Manipulators
Ultrahigh Vacuum
Thermal Effects
spellingShingle Science::Physics
Manipulators
Ultrahigh Vacuum
Thermal Effects
Tee, Xian Yang
Paré, A.
Petrović, Alexander Paul
Panagopoulos, Christos
An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
description We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering.
author2 School of Physical and Mathematical Sciences
author_facet School of Physical and Mathematical Sciences
Tee, Xian Yang
Paré, A.
Petrović, Alexander Paul
Panagopoulos, Christos
format Article
author Tee, Xian Yang
Paré, A.
Petrović, Alexander Paul
Panagopoulos, Christos
author_sort Tee, Xian Yang
title An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
title_short An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
title_full An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
title_fullStr An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
title_full_unstemmed An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
title_sort ultra-high-vacuum rotating sample manipulator with cryogenic cooling
publishDate 2021
url https://hdl.handle.net/10356/148893
_version_ 1759856064386301952

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