An ultra-high-vacuum rotating sample manipulator with cryogenic cooling
We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for...
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sg-ntu-dr.10356-1488932023-02-28T19:52:45Z An ultra-high-vacuum rotating sample manipulator with cryogenic cooling Tee, Xian Yang Paré, A. Petrović, Alexander Paul Panagopoulos, Christos School of Physical and Mathematical Sciences Science::Physics Manipulators Ultrahigh Vacuum Thermal Effects We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering. Ministry of Education (MOE) National Research Foundation (NRF) Published version We acknowledge support from the Singapore National Research Foundation (NRF) Investigatorship (Grant No. NRFNRFI2015-04) and MOE Academic Research Fund Tier 3 (Grant No. MOE2018-T3-1-002). We thank Ferrovac GmbH for technical assistance. 2021-08-30T05:18:58Z 2021-08-30T05:18:58Z 2020 Journal Article Tee, X. Y., Paré, A., Petrović, A. P. & Panagopoulos, C. (2020). An ultra-high-vacuum rotating sample manipulator with cryogenic cooling. Review of Scientific Instruments, 91(11), 116104-. https://dx.doi.org/10.1063/5.0021595 0034-6748 0000-0002-7050-658X 0000-0003-4692-3233 https://hdl.handle.net/10356/148893 10.1063/5.0021595 33261466 2-s2.0-85095827988 11 91 116104 en NRFNRFI2015-04 MOE2018-T3-1-002 Review of Scientific Instruments © 2020 Author(s). All rights reserved. This paper was published by American Institute of Physics (AIP) in Review of Scientific Instruments and is made available with permission of the Author(s). application/pdf |
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Nanyang Technological University |
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NTU Library |
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Asia |
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Singapore Singapore |
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| language |
English |
| topic |
Science::Physics Manipulators Ultrahigh Vacuum Thermal Effects |
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Science::Physics Manipulators Ultrahigh Vacuum Thermal Effects Tee, Xian Yang Paré, A. Petrović, Alexander Paul Panagopoulos, Christos An ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| description |
We report a homebuilt ultra-high-vacuum (UHV) rotating sample manipulator with cryogenic cooling. The sample holder is thermally anchored to a built-in cryogenic cold head through flexible copper beryllium strips, permitting continuous sample rotation. A similar contact mechanism is implemented for electrical wiring to the sample holder for thermometry. The apparatus thus enables continuous sample rotation at regulated cryogenic temperatures in a UHV environment. We discuss applications of this apparatus for cryogenic sputtering. |
| author2 |
School of Physical and Mathematical Sciences |
| author_facet |
School of Physical and Mathematical Sciences Tee, Xian Yang Paré, A. Petrović, Alexander Paul Panagopoulos, Christos |
| format |
Article |
| author |
Tee, Xian Yang Paré, A. Petrović, Alexander Paul Panagopoulos, Christos |
| author_sort |
Tee, Xian Yang |
| title |
An ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| title_short |
An ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| title_full |
An ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| title_fullStr |
An ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| title_full_unstemmed |
An ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| title_sort |
ultra-high-vacuum rotating sample manipulator with cryogenic cooling |
| publishDate |
2021 |
| url |
https://hdl.handle.net/10356/148893 |
| _version_ |
1759856064386301952 |