A novel retractable stiffener-based disk-shaped active compliant polishing tool
A novel active variable compliance polishing tool is proposed to improve the control over the area of contact and pressure distribution during polishing. This active compliance is achieved by employing a retractable stiffener-based design. This novel tool can provide a continuous range of compliance...
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Main Authors: | , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2022
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/155325 |
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Institution: | Nanyang Technological University |
Language: | English |