Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing
Infrared gas sensors hold great promise in the internet of things and artificial intelligence. Making infrared light sources with miniaturized size, reliable and tunable emission is essential but remains challenging. Herein, we present the tailorability of radiant power and the emergence of new emis...
Saved in:
Main Authors: | , , , , , , , , , , |
---|---|
Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2022
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/155819 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
id |
sg-ntu-dr.10356-155819 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-1558192022-11-28T04:45:31Z Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing Li, Nanxi Yuan, Hongye Xu, Linfang Zeng, Yongquan Qiang, Bo Wang, Qi Jie Zheng, Shaonan Cai, Hong Lee, Lennon Yao Ting Singh, Navab Zhao, Dan School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Emission Wavelength Infrared Gas Sensors Infrared gas sensors hold great promise in the internet of things and artificial intelligence. Making infrared light sources with miniaturized size, reliable and tunable emission is essential but remains challenging. Herein, we present the tailorability of radiant power and the emergence of new emission wavelength of microelectromechanical system (MEMS)-based thermal emitters with nickel oxide (NiO) films. The coating of NiO on emitters increases top surface emissivity and induces the appearance of new wavelengths between 15 and 19 µm, all of which have been justified by spectroscopic methods. Furthermore, a sensor array is assembled for simultaneous monitoring of concentrations of carbon dioxide (CO2), methane (CH4), humidity, and temperature. The platform shows selective and sensitive detection at room temperature toward CO2 and CH4 with detection limits of around 50 and 1750 ppm, respectively, and also shows fast response/recovery and good recyclability. The demonstrated emission tailorability of MEMS emitters and their usage in sensor array provide novel insights for designing and fabricating optical sensors with good performance, which is promising for mass production and commercialization. Agency for Science, Technology and Research (A*STAR) National Research Foundation (NRF) Published version Agency for Science, Technology and Research (IAF-PP A1789a0024); National Research Foundation Singapore (NRF-CRP18-2017-02). 2022-11-28T04:45:31Z 2022-11-28T04:45:31Z 2021 Journal Article Li, N., Yuan, H., Xu, L., Zeng, Y., Qiang, B., Wang, Q. J., Zheng, S., Cai, H., Lee, L. Y. T., Singh, N. & Zhao, D. (2021). Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing. Optics Express, 29(12), 19084-19093. https://dx.doi.org/10.1364/OE.422204 1094-4087 https://hdl.handle.net/10356/155819 10.1364/OE.422204 34154150 2-s2.0-85107480356 12 29 19084 19093 en IAF-PP A1789a0024 NRF-CRP18-2017-02 Optics Express © 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for noncommercial purposes and appropriate attribution is maintained. All other rights are reserved. application/pdf |
institution |
Nanyang Technological University |
building |
NTU Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NTU Library |
collection |
DR-NTU |
language |
English |
topic |
Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Emission Wavelength Infrared Gas Sensors |
spellingShingle |
Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Emission Wavelength Infrared Gas Sensors Li, Nanxi Yuan, Hongye Xu, Linfang Zeng, Yongquan Qiang, Bo Wang, Qi Jie Zheng, Shaonan Cai, Hong Lee, Lennon Yao Ting Singh, Navab Zhao, Dan Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing |
description |
Infrared gas sensors hold great promise in the internet of things and artificial intelligence. Making infrared light sources with miniaturized size, reliable and tunable emission is essential but remains challenging. Herein, we present the tailorability of radiant power and the emergence of new emission wavelength of microelectromechanical system (MEMS)-based thermal emitters with nickel oxide (NiO) films. The coating of NiO on emitters increases top surface emissivity and induces the appearance of new wavelengths between 15 and 19 µm, all of which have been justified by spectroscopic methods. Furthermore, a sensor array is assembled for simultaneous monitoring of concentrations of carbon dioxide (CO2), methane (CH4), humidity, and temperature. The platform shows selective and sensitive detection at room temperature toward CO2 and CH4 with detection limits of around 50 and 1750 ppm, respectively, and also shows fast response/recovery and good recyclability. The demonstrated emission tailorability of MEMS emitters and their usage in sensor array provide novel insights for designing and fabricating optical sensors with good performance, which is promising for mass production and commercialization. |
author2 |
School of Electrical and Electronic Engineering |
author_facet |
School of Electrical and Electronic Engineering Li, Nanxi Yuan, Hongye Xu, Linfang Zeng, Yongquan Qiang, Bo Wang, Qi Jie Zheng, Shaonan Cai, Hong Lee, Lennon Yao Ting Singh, Navab Zhao, Dan |
format |
Article |
author |
Li, Nanxi Yuan, Hongye Xu, Linfang Zeng, Yongquan Qiang, Bo Wang, Qi Jie Zheng, Shaonan Cai, Hong Lee, Lennon Yao Ting Singh, Navab Zhao, Dan |
author_sort |
Li, Nanxi |
title |
Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing |
title_short |
Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing |
title_full |
Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing |
title_fullStr |
Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing |
title_full_unstemmed |
Tailorable infrared emission of microelectromechanical system-based thermal emitters with NiO films for gas sensing |
title_sort |
tailorable infrared emission of microelectromechanical system-based thermal emitters with nio films for gas sensing |
publishDate |
2022 |
url |
https://hdl.handle.net/10356/155819 |
_version_ |
1751548540195176448 |