Study of reactive sputtering process in semiconductor manufacturing

• Main Author: Merryanty.
• Other Authors: Li Chuan
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Manufacturing
• Online Access: http://hdl.handle.net/10356/15782
• Institution: Nanyang Technological University

Plasma state occurs when energy is added to gas causing it to be ionised and this state is transferred to material surface for subsequent reactions. The surfaces with these ideal properties can then be cleaned, etched or coated and are used for various industrial applications such as automotive engi...