Practical reviews of exhaust systems operation in semiconductor industry

• Main Authors: Li, Yuanzhe, Zhu, Yalin, Hao, Yu, Xiao, Peng, Dong, Zhili, Li, Xiang
• Other Authors: School of Materials Science and Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2022
• Subjects: Engineering::Materials; Scrubber; Air Pollution Treatment; Semiconductor Company; Exhaust System Operation; Practical Solutions
• Online Access: https://hdl.handle.net/10356/158452
• Institution: Nanyang Technological University

Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same t...