Practical reviews of exhaust systems operation in semiconductor industry

Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same t...

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Bibliographic Details
Main Authors: Li, Yuanzhe, Zhu, Yalin, Hao, Yu, Xiao, Peng, Dong, Zhili, Li, Xiang
Other Authors: School of Materials Science and Engineering
Format: Conference or Workshop Item
Language:English
Published: 2022
Subjects:
Online Access:https://hdl.handle.net/10356/158452
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Institution: Nanyang Technological University
Language: English

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