Develop of wideband acoustic sensor
Acoustic sensors have been widely used in military and commercial equipment due to their superior performance in various aspects. Since the 1980s, research on the production of miniature sensors on silicon wafers using MEMS processing technology has been carried out. According to different wor...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
| Published: |
Nanyang Technological University
2022
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| Online Access: | https://hdl.handle.net/10356/159532 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | Acoustic sensors have been widely used in military and commercial equipment due
to their superior performance in various aspects. Since the 1980s, research on the
production of miniature sensors on silicon wafers using MEMS processing
technology has been carried out. According to different working principles and
working methods, MEMS acoustic sensors are divided into piezoresistive, capacitive,
optical waveguide and other types. Among them, capacitive acoustic sensors have
become one of the mainstream acoustic sensors due to its high sensitivity and low
noise.
MEMS acoustic sensor includes two parts: front sensor and integrated readout circuit.
This paper mainly focuses on several basic readout circuit modules and their working
principle, including frequency capacitance-to-digital converter, voltage-based
capacitance-to-digital converter, SAR-ADC and integrating ADC.
In this paper, a readout circuit for capacitive acoustic sensor is designed. The circuit
includes a fully differential two-stage operational amplifier and a capacitor voltage
conversion circuit. After the circuit verification and simulation, the performance of
the circuit meets the design requirements. |
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