Develop of wideband acoustic sensor
Acoustic sensors have been widely used in military and commercial equipment due to their superior performance in various aspects. Since the 1980s, research on the production of miniature sensors on silicon wafers using MEMS processing technology has been carried out. According to different wor...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis-Master by Coursework |
| Language: | English |
| Published: |
Nanyang Technological University
2022
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/159532 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |