Experimental study on actuation characteristics of macro fibre composite
With the inexhaustible needs for smaller and more portable devices around, we have seen great advancements in the Microelectromechanical systems (MEMS). A MEMS device is basically an integration of mechanical elements, sensors and electronics on a common silicone substrate with the use of micro-f...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2009
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/16069 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | With the inexhaustible needs for smaller and more portable devices around, we
have seen great advancements in the Microelectromechanical systems (MEMS).
A MEMS device is basically an integration of mechanical elements, sensors and
electronics on a common silicone substrate with the use of micro-fabrication
processes. Apart from the electronics which are manufactured using Integrated
Circuit (IC) process sequences, the micro-mechanical components are produced
by technologies like Bulk Micromachining, Surface Micromachining and Deep
Reactive Ion Etching. Examples of MEMS devices are pressure sensors and
MEMS devices for secure communications. |
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