Experimental study on actuation characteristics of macro fibre composite

• Main Author: Loo, Chin Yi.
• Other Authors: Yang Yaowen
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials::Composite materials
• Online Access: http://hdl.handle.net/10356/16069
• Institution: Nanyang Technological University

With the inexhaustible needs for smaller and more portable devices around, we have seen great advancements in the Microelectromechanical systems (MEMS). A MEMS device is basically an integration of mechanical elements, sensors and electronics on a common silicone substrate with the use of micro-fabrication processes. Apart from the electronics which are manufactured using Integrated Circuit (IC) process sequences, the micro-mechanical components are produced by technologies like Bulk Micromachining, Surface Micromachining and Deep Reactive Ion Etching. Examples of MEMS devices are pressure sensors and MEMS devices for secure communications.