Fabrication of PtIrPd noble metal medium entropy alloy thin film by atomic layer deposition

• Main Authors: Zou, Yiming, Jing, Lin, Wang, Leyan, Tan, Hui Teng, Goei, Ronn, Yong, Sidney Kwong Roong, Ong, Amanda Jiamin, Tan, Kwan Wee, Tok, Alfred Iing Yoong
• Other Authors: School of Materials Science and Engineering
• Format: Article
• Language: English
• Published: 2022
• Subjects: Engineering::Materials::Nanostructured materials; Atomic Layer Deposition; Electric Joule Heating
• Online Access: https://hdl.handle.net/10356/163868
• Institution: Nanyang Technological University

Noble metal medium entropy alloy (MEA) thin films have recently attracted enormous research interests recently because of their great potential in the catalytic application. However, conventional bottom-up fabrication methods for MEA thin film such as magnetron sputtering face enormous challenges in...