Fatigue behavior of polysilicon nanowires.
With advances in silicon microfabrication techniques, electromechanical sensors are shrunk to nanometer scale. Besides enhanced sensitivity, these nanoscaled sensors are found with improved electromechanical and thermoelectric property. Although the future of these devices is promising, the feasi...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2009
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| Online Access: | http://hdl.handle.net/10356/16595 |
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| Institution: | Nanyang Technological University |
| Language: | English |