Fatigue behavior of polysilicon nanowires.

With advances in silicon microfabrication techniques, electromechanical sensors are shrunk to nanometer scale. Besides enhanced sensitivity, these nanoscaled sensors are found with improved electromechanical and thermoelectric property. Although the future of these devices is promising, the feasi...

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Bibliographic Details
Main Author: Tan, Loo Ling.
Other Authors: Liao Kin
Format: Final Year Project
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/16595
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Institution: Nanyang Technological University
Language: English

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