Study on ultra-precision compliant mechanisms for nanotechnology applications

• Main Authors: Du, Hejun, Lim, Mong King, Ling, Shih Fu, Lau, Michael Wai Shing, Tai, Kang
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Nanotechnology
• Online Access: http://hdl.handle.net/10356/6943
• Institution: Nanyang Technological University

Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical...