Development of a linear micro actuator for ultra-precision positioning (Vol.2)

There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positi...

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Bibliographic Details
Main Authors: Du, Hejun, Lim, Mong King, Ling, Shih Fu, Gong, Thomas Haiqing, Lin, Rongming, Hung, Nguyen Phu
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/7017
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Institution: Nanyang Technological University