Study on ultra-precision compliant mechanisms for nanotechnology applications
Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical...
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| Main Authors: | , , , , |
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| 其他作者: | |
| 格式: | Research Report |
| 出版: |
2008
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| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/6942 |
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| 機構: | Nanyang Technological University |