Study on ultra-precision compliant mechanisms for nanotechnology applications

• Main Authors: Du, Hejun, Lim, Mong King, Ling, Shih Fu, Lau, Michael Wai Shing, Tai, Kang
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Nanotechnology
• Online Access: http://hdl.handle.net/10356/6942
• Institution: Nanyang Technological University

Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical systems (MEMS) and robots, where micron or even nanometric resolution and accuracy are required for the motion. On the contrary to rigid-body mechanisms, compliant mechanisms consist of monolithic construction without rigid joints or sliders. Thus, they effectively eliminate the wear, backlash, lubrication, and friction problems, which are often encountered by rigid-body mechanisms. Furthermore, their monolithic construction makes the costly assembly process unnecessary and the integration of smart sensors and actuators possible.