Study on ultra-precision compliant mechanisms for nanotechnology applications
Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical...
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6942 |
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| Institution: | Nanyang Technological University |
| Summary: | Including: 2 parts. Compliant mechanisms provide motion through elastic deformation under the action of external loads. These mechanisms are key functional members in many today's precision machines and devices, such as precision micro-positioning stages, micro actuators, microelectromechanical systems (MEMS) and robots, where micron or even nanometric resolution and accuracy are required for the motion. On the contrary to rigid-body mechanisms, compliant mechanisms consist of monolithic construction without rigid joints or sliders. Thus, they effectively eliminate the wear, backlash, lubrication, and friction problems, which are often encountered by rigid-body mechanisms. Furthermore, their monolithic construction makes the costly assembly process unnecessary and the integration of smart sensors and actuators possible. |
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