Fatigue behavior of polysilicon nanowires.

• 主要作者: Tan, Loo Ling.
• 其他作者: Liao Kin
• 格式: Final Year Project
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Nanotechnology
• 在線閱讀: http://hdl.handle.net/10356/16595
• 機構: Nanyang Technological University

With advances in silicon microfabrication techniques, electromechanical sensors are shrunk to nanometer scale. Besides enhanced sensitivity, these nanoscaled sensors are found with improved electromechanical and thermoelectric property. Although the future of these devices is promising, the feasi...