Modeling and characterization of nano-gap contact acceleration switch for ultra-low power IoT sensor node

• Main Author: Hu, Zhongshi
• Other Authors: Tang Xiaohong
• Format: Thesis-Master by Coursework
• Language: English
• Published: Nanyang Technological University 2023
• Subjects: Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/166282
• Institution: Nanyang Technological University

MEMS devices have been widely adopted in many areas of consumer electronics, automotive, and industrial applications due to their small size, low power consumption and low-cost integration. However, the always-on sensors based on MEMS have a standby power consumption. With the development of IoT, mo...