Study and analysis of different contact materials for ohmic RF MEMS switch

• Main Author: Raihanah Abdul Razak
• Other Authors: Wang Hong
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/46085

MicroElectroMechanical Systems (MEMS) are integrated micro devices or systems combining electrical and mechanical components that can sense, control, and actuate on the micro scale and function individually or in arrays to generate effects on the macro scale. MEMS is one of the most promising areas...