RF MEMs devices development for telecommunications

• Main Authors: Liu, Ai Qun, Yu, Aibin, Tang, Min, Muhammad Faeyz Karim, Zhang, Xinjun, Win Palei
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/14531
• Institution: Nanyang Technological University

Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signal from DC to microwave frequencies. The micromachining techniques used to fabricate these components are based on the standard CMOS techniques for...