Atomic layer deposition of molybdenum sulfide for piezoelectric application

• Main Author: Adnan Faishal Taufiq
• Other Authors: Alfred Tok Iing Yoong
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2023
• Subjects: Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/166788
• Institution: Nanyang Technological University

The development of piezoelectric materials has attracted significant attention to their potential applications in various field such as sensors and energy harvesting materials. Among piezoelectric materials, Molybdenum Sulfide (MoS2) has emerged as a top candidate in flexible devices with their uniq...