Performance analysis of an integrated piezoelectric ZnO sensor for detection of head–disk contact

• Main Authors: Yuan, Yanhui, Du, Hejun, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/101400; http://hdl.handle.net/10220/18361
• Institution: Nanyang Technological University

Integrated capability for detection of head-disk contact is desired for magnetic sliders with near-contact flying height. At the same time, fabrication of added features should be compatible with the existing slider micromachining process which is highly specialized and cost sensitive. Aimed at meet...