Fabrication and characterization of sputtered ZnO thin film for head-disk interface application

• المؤلف الرئيسي: Yu, Xue.
• مؤلفون آخرون: Du Hejun
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2011
• الموضوعات: DRNTU::Engineering::Manufacturing; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/45236
• المؤسسة: Nanyang Technological University

The increasing of hard disk capacities requires a decreasing flying height of hard disk drive slider. The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. In this study, ZnO thin films were deposited on Si and Al/SiO2/Si substrate using...