Fabrication and characterization of sputtered ZnO thin film for head-disk interface application

• Main Author: Yu, Xue.
• Other Authors: Du Hejun
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Manufacturing; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/45236
• Institution: Nanyang Technological University

The increasing of hard disk capacities requires a decreasing flying height of hard disk drive slider. The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. In this study, ZnO thin films were deposited on Si and Al/SiO2/Si substrate using...