Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature

• Main Authors: Wang, Y. G., Lau, S. P., Lee, H. W., Yu, S. F., Tay, B. K., Zhang, X. H., Tse, K. Y., Hng, H. H.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/90403; http://hdl.handle.net/10220/18826
• Institution: Nanyang Technological University

Room temperature deposition of high crystal quality zinc oxide (ZnO) films was realized by the filtered cathodic vacuum arc (FCVA) technique. Detrimental macroparticles in the plasma as byproducts of arcing process are removed with an off-plane double bend magnetic filter. The influence of oxygen...