Filtered cathodic vacuum arc deposition of metal nitrides

The numerous applications of group III nitride semiconductors have attracted significant research interest over the last decade. A novel ion-beam assisted filtered cathodic vacuum arc (I-FCVA) technique has been developed to fabricate III nitrides using pure metallic target as metal source. For the...

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Bibliographic Details
Main Author: Ji, Xiaohong
Other Authors: Lau Shu Ping, Daniel
Format: Theses and Dissertations
Language:English
Published: 2009
Subjects:
Online Access:https://hdl.handle.net/10356/19083
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Institution: Nanyang Technological University
Language: English