Modeling and characterization of double bend filtered cathodic vacuum arc system

• Main Author: You, Guo Feng
• Other Authors: Tay, Beng Kang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: http://hdl.handle.net/10356/3909
• Institution: Nanyang Technological University

The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass th...