Modeling and characterization of double bend filtered cathodic vacuum arc system

The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass th...

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Main Author:	You, Guo Feng
Other Authors:	Tay, Beng Kang
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
Online Access:	http://hdl.handle.net/10356/3909
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3909
record_format	dspace
spelling	sg-ntu-dr.10356-39092023-07-04T15:16:11Z Modeling and characterization of double bend filtered cathodic vacuum arc system You, Guo Feng Tay, Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, meanwhile those neutral particle moving in the straight lines are filtered away, Master of Engineering 2008-09-17T09:40:11Z 2008-09-17T09:40:11Z 2002 2002 Thesis http://hdl.handle.net/10356/3909 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
spellingShingle	DRNTU::Engineering::Materials::Microelectronics and semiconductor materials You, Guo Feng Modeling and characterization of double bend filtered cathodic vacuum arc system
description	The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, meanwhile those neutral particle moving in the straight lines are filtered away,
author2	Tay, Beng Kang
author_facet	Tay, Beng Kang You, Guo Feng
format	Theses and Dissertations
author	You, Guo Feng
author_sort	You, Guo Feng
title	Modeling and characterization of double bend filtered cathodic vacuum arc system
title_short	Modeling and characterization of double bend filtered cathodic vacuum arc system
title_full	Modeling and characterization of double bend filtered cathodic vacuum arc system
title_fullStr	Modeling and characterization of double bend filtered cathodic vacuum arc system
title_full_unstemmed	Modeling and characterization of double bend filtered cathodic vacuum arc system
title_sort	modeling and characterization of double bend filtered cathodic vacuum arc system
publishDate	2008
url	http://hdl.handle.net/10356/3909
_version_	1772825439693176832

Modeling and characterization of double bend filtered cathodic vacuum arc system

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