Mechanical and tribological study of DLC coatings deposited by filtered cathodic vacuum arc

• Main Author: Choo, Chee Wee.
• Other Authors: Sam Zhang Shanyong
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/45620
• Institution: Nanyang Technological University

Diamond-like carbon (DLC) coating is a well know material for its high hardness, good wear resistance and low friction when sliding against most engineering materials. On the other hand, DLC has weakness like high residual stress, low toughness, bad thermal stability and poor oxidation resistance. W...